Misalignment :

The picture shows the misalignment ( 1st row),

and how we can improve it by tilting the combiner ( 2nd row).

From the 1st row, we can tell the distortion is mainly from M5 and the worst misalignment is less than 1 pixel.

The 2nd row is from tilting the combiner 1.3 degree.

Note that since M5 affects the distortion a lot, the actual misalignment can not be known till we get in CSO.